Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection

In this paper, the effects of initial deflection on static and dynamic behaviors circular capacitive transducers are experimentally investigated. The obtained results in good agreement with numerical simulations. It is shown that has a major impact response resonator by shifting pull-in voltage, its increasing resonance frequency modifying bifurcation topology from softening to hardening behavior. Moreover, behavior microplate may display nonlinear periodic quasiperiodic responses due geometric electrostatic nonlinearities.